Integrating mems and ics
The majority of microelectromechanical system (MEMS) devices must be combined with
integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers …
integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers …
Micromachined resonators: A review
This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …
decades in design, modeling, and fabrication of micromachined resonators. Although micro …
MEMS resonators for frequency reference and timing applications
An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …
and timing applications is presented. The progress made in the past few decades in design …
Flexible carbon nanotube‐epitaxially grown nanocrystals for micro‐thermoelectric modules
Flexible thermoelectric materials have attracted increasing interest because of their potential
use in thermal energy harvesting and high‐spatial‐resolution thermal management …
use in thermal energy harvesting and high‐spatial‐resolution thermal management …
[图书][B] MEMS vibratory gyroscopes: structural approaches to improve robustness
C Acar, A Shkel - 2008 - books.google.com
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental
operational principles of micromachined vibratory rate gyroscopes, and introduces structural …
operational principles of micromachined vibratory rate gyroscopes, and introduces structural …
[图书][B] Silicon carbide microsystems for harsh environments
M Wijesundara, R Azevedo - 2011 - books.google.com
Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon
Carbide (SiC) technologies that, when combined, create microsystems capable of surviving …
Carbide (SiC) technologies that, when combined, create microsystems capable of surviving …
Technologies for cofabricating MEMS and electronics
Microfabrication technologies initially developed for integrated electronics have been
successfully applied to batch-fabricate a wide variety of micromechanical structures for …
successfully applied to batch-fabricate a wide variety of micromechanical structures for …
Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators
We have developed a single-wafer vacuum encapsulation for microelectromechanical
systems (MEMS), using a thick (20-mum) polysilicon encapsulation to package …
systems (MEMS), using a thick (20-mum) polysilicon encapsulation to package …
Sensing movement: Microsensors for body motion measurement
H Zeng, Y Zhao - Sensors, 2011 - mdpi.com
Recognition of body posture and motion is an important physiological function that can keep
the body in balance. Man-made motion sensors have also been widely applied for a broad …
the body in balance. Man-made motion sensors have also been widely applied for a broad …
Quantum limit of quality factor in silicon micro and nano mechanical resonators
Micromechanical resonators are promising replacements for quartz crystals for timing and
frequency references owing to potential for compactness, integrability with CMOS fabrication …
frequency references owing to potential for compactness, integrability with CMOS fabrication …