The past few decades have witnessed growing research interest in developing powerful
nanofabrication technologies for three-dimensional (3D) structures and devices to achieve …

In this paper, a total of 57 micro and nano scale hybrid manufacturing processes are
reviewed. These processes are categorized in terms of process timing and process type …

Area-selective atomic layer deposition (AS-ALD) is attracting increasing interest because of
its ability to enable both continued dimensional scaling and accurate pattern placement for …

Ultrafast radiographic imaging and tracking (U-RadIT) use state-of-the-art ionizing particle
and light sources to experimentally study sub-nanosecond transients or dynamic processes …

GeSn materials have attracted considerable attention for their tunable band structures and
high carrier mobilities, which serve well for future photonic and electronic applications. This …

In this work, a facile nanofabrication approach for functional 3D micro-nano architectures is
developed. Freestanding silicon 3D micro-nanostructures are fabricated by precisely …

Silicon carbide (SiC) is a promising material for a wide range of applications, including
mechanical nano‐resonators, quantum photonics, and non‐linear photonics. However, its …

A number of unconventional micromachining technologies are emerging that are of potential
interest for microelectromechanical systems (MEMS) manufacturing. Such micromachining …

Selective laser melting (SLM) or Laser-based powder bed fusion (LBPF) is gaining much
attention for the fabrication of novel materials with complex shapes, improved functionalities …

This paper presents etching optimization of comb structure formation in small silicon
substrates mounted on a large silicon wafer (150 mm diameter) using the S1818 photoresist …