[HTML][HTML] Combinatorial ALD for the growth of ZnO/TiO 2 nanolaminates and mixed ZnO/TiO 2 nanostructured films

S Doyle, L Ryan, MM McCarthy, M Modreanu… - Materials …, 2022 - pubs.rsc.org
In this study, combinatorial atomic layer deposition (C-ALD) has been used to deposit
layered ZnO and TiO2 nanolaminates on both oxide-covered Si (100) wafers and glass …

Analysis of the successive breakdown statistics of multilayer Al2O3/HfO2 gate stacks using the time-dependent clustering model

J Muñoz-Gorriz, MB Gonzalez, F Campabadal… - Microelectronics …, 2020 - Elsevier
The successive oxide failure statistics theory that arises from the clustering model is used for
investigating the time-to-breakdown distributions of Al 2 O 3/HfO 2-based nanolaminates …

Function-fit model for the rate of conducting filament generation in constant voltage-stressed multilayer oxide stacks

A Rodriguez-Fernandez, J Suñé, E Miranda… - Journal of Vacuum …, 2017 - pubs.aip.org
A simple function-fit model is proposed for the rate of conducting filament generation in Al 2
O 3/HfO 2-based multilayer stacks subjected to a constant voltage stress. During …

[图书][B] Analysis and modeling of filamentary conduction in Hf0₂-based structures

A Rodríguez Fernández - 2018 - ddd.uab.cat
We are currently facing a revolution in the fields of microelectronics and information
technologies that will surely affect our way of life in the years to come. In this regard, the …