For optical measurements of areal surface topography, the instrument transfer function (ITF)
quantifies height response as a function of the lateral spatial frequency content of the …

This review gathers together 15 special topics in modern interferometric metrology
representing a sampling of historical, current and future developments. The selected topics …

Virtual instruments provide task-specific uncertainty evaluation in surface and dimensional
metrology. We demonstrate the first virtual coherence scanning interferometer that can …

Surface topography measuring interference microscopy is a three-dimensional (3D) imaging
technique that provides quantitative analysis of industrial and biomedical specimens. Many …

Two major fields of study in optics—holography and interferometry—have developed at
times independently and at other times together. The two methods share the principle of …

Emergence of products that feature functional surfaces with complex geometries, such as
freeform optics in consumer electronics and augmented reality and virtual reality, requires …

Despite the fact that optical profilers, such as coherence scanning interferometers, are
frequently used for fast and contactless topography measurements in various fields of …

Coherence scanning interferometry (CSI), a type of interference microscopy, has found
broad applications in the advanced manufacturing industry, providing high-accuracy surface …

If high numerical apertures are used in coherence scanning interferometry, an extension of
the interference signal's spectral distribution to lower frequencies can be observed …

Abstract Information-rich metrology refers to the incorporation of any type of available
information in the data acquisition and processing pipeline of a measurement process, in …