Pressure sensors play a vital role in aerospace, automotive, medical, and consumer
electronics. Although microelectromechanical system (MEMS)-based pressure sensors have …

In this paper, a novel capacitive micromachined ultrasonic transducer (CMUT)-based
resonant biochemical sensor is presented to detect SO 2 with a sensitive polymer layer …

Ultrasonic fluid bubble detection is important in industrial controls, aerospace systems and
clinical medicine because it can prevent fatal mechanical failures and threats to life …

Gravimetric resonant-inspired biosensors have attracted increasing attention in industrial
and point-of-care applications, enabling label-free detection of biomarkers such as DNA and …

Label-free biosensors, combined with miniaturized micro-electromechanical sensory
platforms, offer an attractive solution for real-time and facile monitoring of biomolecules due …

Electrostatically actuated microplates with multilayer and material anisotropy properties, are
widely employed in microelectromechanical systems. However, previous theories rarely …

It has been demonstrated that the adhesive wafer bonding technique benefits the fabrication
of capacitive micromachined ultrasonic transducers (CMUTs) in the aspects of structural …

The equivalent circuit is a commonly used tool for performance analysis during CMUT
design and optimization. In this study, the immersion equivalent circuit model of square …

Tight integration of capacitive micromachined ultrasonic transducer (CMUT) arrays with
integrated circuits can make active impedance matching feasible for practical imaging …

Capacitive micromechanical ultrasonic transducers (CMUTs) have widespread applications
in ultrasonic imaging, therapeutic treatment, and underwater applications. Reasonable …