Dawn of nitride ferroelectric semiconductors: from materials to devices

P Wang, D Wang, S Mondal, M Hu… - Semiconductor Science …, 2023 - iopscience.iop.org
III-nitride semiconductors are promising optoelectronic and electronic materials and have
been extensively investigated in the past decades. New functionalities, such as …

Piezoelectric aluminum nitride thin films for microelectromechanical systems

G Piazza, V Felmetsger, P Muralt, RH Olsson III… - MRS bulletin, 2012 - cambridge.org
This article reports on the state-of-the-art of the development of aluminum nitride (AlN) thin-
film microelectromechanical systems (MEMS) with particular emphasis on acoustic devices …

[HTML][HTML] Next generation ferroelectric materials for semiconductor process integration and their applications

T Mikolajick, S Slesazeck, H Mulaosmanovic… - Journal of Applied …, 2021 - pubs.aip.org
Ferroelectrics are a class of materials that possess a variety of interactions between
electrical, mechanical, and thermal properties that have enabled a wealth of functionalities …

Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films

M Akiyama, K Kano, A Teshigahara - Applied Physics Letters, 2009 - pubs.aip.org
The authors have investigated the influence of growth temperature and scandium
concentration on the piezoelectric response of scandium aluminum nitride (Sc x Al 1− x N) …

Tunable optoelectronic and ferroelectric properties in Sc-based III-nitrides

S Zhang, D Holec, WY Fu, CJ Humphreys… - Journal of applied …, 2013 - pubs.aip.org
Sc-based III-nitride alloys were studied using density functional theory with special quasi-
random structure methodology. Sc x Al 1− x N and Sc x Ga 1− x N alloys are found to be …

Phonon related properties of transition metals, their carbides, and nitrides: A first-principles study

EI Isaev, SI Simak, IA Abrikosov, R Ahuja… - Journal of applied …, 2007 - pubs.aip.org
Lattice dynamics of body-centered cubic (bcc) V b-VI b group transition metals (TM), and B 1-
type monocarbides and mononitrides of III b-VI b transition metals are studied by means of …

Vertical etching of scandium aluminum nitride thin films using TMAH solution

ASMZ Shifat, I Stricklin, RK Chityala, A Aryal, G Esteves… - Nanomaterials, 2023 - mdpi.com
A wide bandgap, an enhanced piezoelectric coefficient, and low dielectric permittivity are
some of the outstanding properties that have made Sc x Al 1− x N a promising material in …

Switching it up: New mechanisms revealed in wurtzite-type ferroelectrics

CW Lee, K Yazawa, A Zakutayev, GL Brennecka… - Science …, 2024 - science.org
Wurtzite-type ferroelectrics have drawn increasing attention due to the promise of better
performance and integration than traditional oxide ferroelectrics with semiconductors such …

The new nitrides: Layered, ferroelectric, magnetic, metallic and superconducting nitrides to boost the GaN photonics and electronics eco-system

D Jena, R Page, J Casamento, P Dang… - Japanese Journal of …, 2019 - iopscience.iop.org
The nitride semiconductor materials GaN, AlN, and InN, and their alloys and
heterostructures have been investigated extensively in the last 3 decades, leading to several …

Molecular beam epitaxy and characterization of wurtzite ScxAl1− xN

P Wang, DA Laleyan, A Pandey, Y Sun, Z Mi - Applied Physics Letters, 2020 - pubs.aip.org
We demonstrate the growth of pure wurtzite phase Sc x Al 1− x N with a Sc composition as
high as x= 0.34 on GaN and AlN templates using plasma-assisted molecular beam epitaxy …