A review of stereolithography: Processes and systems

J Huang, Q Qin, J Wang - Processes, 2020 - mdpi.com
Being the earliest form of additive manufacturing, stereolithography (SLA) fabricates 3D
objects by selectively solidifying the liquid resin through a photopolymerization reaction. The …

A review on 3D micro-additive manufacturing technologies

M Vaezi, H Seitz, S Yang - The International Journal of Advanced …, 2013 - Springer
New microproducts need the utilization of a diversity of materials and have complicated
three-dimensional (3D) microstructures with high aspect ratios. To date, many …

3D printing: an emerging tool for novel microfluidics and lab-on-a-chip applications

AA Yazdi, A Popma, W Wong, T Nguyen, Y Pan… - Microfluidics and …, 2016 - Springer
In the past few years, 3D printing technology has witnessed an explosive growth,
penetrating various aspects of our lives. Current best-in-class 3D printers can fabricate …

Advances in 3D nano/microfabrication using two-photon initiated polymerization

KS Lee, RH Kim, DY Yang, SH Park - Progress in Polymer Science, 2008 - Elsevier
In recent years considerable efforts have been put forth in two-photon initiated
polymerization (TPP)-based two-and three-dimensional (2D and 3D) nano/microfabrication …

Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching

CM Waits, B Morgan, M Kastantin, R Ghodssi - Sensors and Actuators A …, 2005 - Elsevier
Micromachining arbitrary 3D silicon structures for micro-electromechanical systems can be
accomplished using gray-scale lithography along with dry anisotropic etching. In this study …

Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS

J Zhang, KL Tan, GD Hong, LJ Yang… - … of Micromechanics and …, 2001 - iopscience.iop.org
In this paper, SU-8 EPON-based photoresist (PR) polymerization optimization and its
possible microfluidic and MEMS applications are reported. First, the optimization results of …

Laser 3D micro-manufacturing

A Piqué, RCY Auyeung, H Kim… - Journal of physics D …, 2016 - iopscience.iop.org
Laser-based materials processing techniques are gaining widespread use in micro-
manufacturing applications. The use of laser microfabrication techniques enables the …

Investigation of gray-scale technology for large area 3D silicon MEMS structures

CM Waits, A Modafe, R Ghodssi - Journal of Micromechanics and …, 2002 - iopscience.iop.org
Micromachining arbitrary 3D silicon structures for micro-electromechanical systems can be
accomplished using gray-scale lithography along with dry anisotropic etching. In this study …

Development of a deep silicon phase Fresnel lens using gray-scale lithography and deep reactive ion etching

B Morgan, CM Waits, J Krizmanic… - Journal of …, 2004 - ieeexplore.ieee.org
We report the first fabrication and development of a deep phase Fresnel lens (PFL) in silicon
through the use of gray-scale lithography and deep-reactive ion etching (DRIE). A Gaussian …

Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS)

J Zhang, KL Tan, HQ Gong - Polymer testing, 2001 - Elsevier
In this paper, we report the optimization results of SU-8 EPON-based photoresist (PR)
polymerization and its possible microfluidic and MEMS applications. First, the optimization …