This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …

This paper reports a high-sensitivity resonant electrometer based on the mode localization
of two degree-of-freedom weakly coupled resonators (WCRs). When charges are applied to …

Since the discovery of the electron, the accurate detection of electrical charges has been a
dream of the scientific community. Owing to some remarkable advantages, micro …

This paper reports the design and electrical characterization of a micromechanical disk
resonator fabricated in single crystal silicon using a foundry SOI micromachining process …

We report a highly sensitive prototype micromechanical electrometer that employs the
phenomena of mode-localization and curve veering for monitoring minute charge …

During the last three decades, the remarkable dynamic features of microelectromechanical
systems (MEMS) and nanoelectromechanical systems (NEMS), and advances in solid-state …

This paper presents a frequency-based silicon micromechanical resonant magnetic field
sensor with a high quality factor by using a double-ended tuning fork (DETF). The sensing …

This paper describes a technical approach toward the realization of a low-power
temperature-compensated micromachined resonant strain sensor. The sensor design is …

The paper reports on the fabrication and characterization of high-resolution strain sensors
for structural materials based on Silicon On Insulator flexural resonators manufactured by …