This paper presents design, fabrication and calibration results for a novel 2-DOF capacitive
force sensor capable of resolving forces up to 490 µN with a resolution of 0.01 µN in x, and …

Thermal budget limits for low stand-by power (LSP), 0.25/spl mu/m foundry CMOS devices
have been investigated, in order to assess the impact of post-processing …

Two approaches were demonstrated for fabricating microstructures after completion of
CMOS circuits with aluminum metallization. The first approach employed n-type poly-Ge …

A high-sensitivity, low-noise in-plane (lateral) capacitive silicon microaccelerometer utilizing
a combined surface and bulk micromachining technology is reported. The accelerometer …

This disclosure provides systems, methods and apparatus, including computer programs
encoded on computer storage media, for making and using gyroscopes. Such gyroscopes …

Microfabricated accelerometer sensors have been developed to measure acceleration in a
variety of applications, including automobile airbag crash sensors and seismic activity …

This paper presents a new two-dimensional (2D) simulator, which can simulate the etching
polymerization alternation in the Bosch process for an infinite trench. Physical models for …

The design, fabrication, modelling, and control of a two-axis electrostatic microactuator for
precision manipulation tasks is described. A high-yield fabrication process using deep …

The present invention generally relates to micromachined semiconductor sensors and their
fabrication. More particu larly, this invention relates to a sensor comprising a capacitive …

This paper reports dynamic behavior of a liquid-state accelerometer prototype, which uses a
liquid marble as the inertial proof mass. The governing equation is developed in comparison …