The measurement and impact of negative oxygen ions during reactive sputter deposition
D Depla - Critical Reviews in Solid State and Materials Sciences, 2024 - Taylor & Francis
Many thin film applications are based on oxides. The optimization of the oxide properties is
an on-going process and requires a deep understanding of the deposition process. A typical …
an on-going process and requires a deep understanding of the deposition process. A typical …
Spatially resolved optoelectronic properties of Al-Doped zinc oxide thin films deposited by radio-frequency magnetron plasma sputtering without substrate heating
E Stamate - Nanomaterials, 2019 - mdpi.com
Transparent and conducting thin films were deposited on soda lime glass by RF magnetron
sputtering without intentional substrate heating using an aluminum doped zinc oxide target …
sputtering without intentional substrate heating using an aluminum doped zinc oxide target …
Origin of high carrier mobility and low residual stress in RF superimposed DC sputtered Al doped ZnO thin film for next generation flexible devices
In this work, the energy and flux of high energetic ions were controlled by RF superimposed
DC sputtering process to increase the grain size and suppress grain boundary potential with …
DC sputtering process to increase the grain size and suppress grain boundary potential with …
Dopants and induced residual stress-controlled thermoelectric properties of ZnO thin films
We investigate the structure, optical properties, and thermoelectric power in terms of residual
stresses induced in the undoped ZnO and X-doped ZnO (X= Al, Ga) films. The results show …
stresses induced in the undoped ZnO and X-doped ZnO (X= Al, Ga) films. The results show …
Comparative study of aluminum-doped zinc oxide, gallium-doped zinc oxide and indium-doped tin oxide thin films deposited by radio frequency magnetron sputtering
A timely replacement of the rather expensive indium-doped tin oxide with aluminum-doped
zinc oxide is hindered by the poor uniformity of electronic properties when deposited by …
zinc oxide is hindered by the poor uniformity of electronic properties when deposited by …
Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering
In this study, aluminum-doped zinc oxide (AZO) thin films were deposited by DC magnetron
sputtering at room temperature. The distance between the substrate and target axis, and …
sputtering at room temperature. The distance between the substrate and target axis, and …
Selected properties of AlxZnyO thin films prepared by reactive pulsed magnetron sputtering using a two-element Zn/Al target
W Posadowski, A Wiatrowski… - Beilstein Journal of …, 2022 - beilstein-journals.org
Al x Zn y O thin films were obtained by reactive pulsed magnetron sputtering. A two-element
Zn/Al planar target was used as source material prepared in the form of a Zn disc (100 mm …
Zn/Al planar target was used as source material prepared in the form of a Zn disc (100 mm …
Orientation-dependent Electrical and Optical Characteristics of non-epitaxial Al-doped ZnO thin films
J Li, M Liu, B Sun, Y Liu, C Wang, J He - Ceramics International, 2024 - Elsevier
Based on the theory of crystal anisotropy, it is proposed to improve electrical and optical
performance by adjusting the orientation growth of Al-doped ZnO thin films. AZO thin films …
performance by adjusting the orientation growth of Al-doped ZnO thin films. AZO thin films …
Room temperature deposition of high figure of merit Al-doped zinc oxide by pulsed-direct current magnetron sputtering: Influence of energetic negative ion …
Aluminum-doped zinc oxide is regarded as a promising indium-free transparent conductive
oxide for photovoltaic and transparent electronics. In this study high transmittance (up to 90 …
oxide for photovoltaic and transparent electronics. In this study high transmittance (up to 90 …
Effects of the erosion zone of magnetron sputtering targets on the spatial distribution of structural and electrical properties of transparent conductive Al-doped ZnO …
J Nomoto, H Makino, K Inaba, S Kobayashi… - Journal of Applied …, 2018 - pubs.aip.org
We investigated the effects of the erosion zone of magnetron sputtering (MS) targets on the
deposition rates of magnetron-sputtered Al-doped ZnO (AZO) polycrystalline films and on …
deposition rates of magnetron-sputtered Al-doped ZnO (AZO) polycrystalline films and on …