Development of electrostatic microactuators: 5-year progress in modeling, design, and applications
I Morkvenaite-Vilkonciene, V Bucinskas… - Micromachines, 2022 - mdpi.com
The implementation of electrostatic microactuators is one of the most popular technical
solutions in the field of micropositioning due to their versatility and variety of possible …
solutions in the field of micropositioning due to their versatility and variety of possible …
[PDF][PDF] A Novel MEMS Actuator Driven with a Low DC Voltage.
J Mizuno - Sensors & Materials, 2023 - sensors.myu-group.co.jp
In this paper, we propose a novel MEMS actuator that can achieve a relatively large in-plane
displacement of 5 μm or more driven with a low dc voltage of 3.3 to 5.0 V to ensure …
displacement of 5 μm or more driven with a low dc voltage of 3.3 to 5.0 V to ensure …
Active vibration isolator based on micromachined electrostatic actuators
Parallel plate actuators (PPAs) are widely used actuators in microelectromechanical
systems. A PPA can be utilised as a passive/active vibration isolator. A novel active vibration …
systems. A PPA can be utilised as a passive/active vibration isolator. A novel active vibration …
Beyond Snap-In: A Hybrid Nonlinear Control Approach for Actuators Possessing a Square-Law Characteristic
The undesired square-law characteristics in micro-electrostatic actuators and magnetic
solenoids results in a limited stable range, which reduces their application fields and …
solenoids results in a limited stable range, which reduces their application fields and …