Microelectromechanical systems sensors have been intensively developed utilizing various
physical concepts, such as piezoresistive, piezoelectric, and thermoresistive effects. Among …

In this paper, we report on a miniaturized device that can generate ion wind flow with very
low net charge. Both positive and negative ions are simultaneously generated from two …

In this paper, we present a study on a jet flow, assisted by low net charge ion wind from
bipolar corona discharge setup. The ion wind is simultaneously generated from both positive …

This paper presents the development of a gas-jet micropump with different cross-junctions
and integrated hotwire. The device is actuated by a piezoelectric lead zirconate titanate …

We present a simple and efficient airflow generator utilizing the effect of ion wind by
generating simultaneously both the positive and negative ions from two sharp electrodes …

In this paper, we report the design study of a fluidic device that produces four microjet flows
comprising two perpendicular pairs of flow and the application of these jets for an angular …

We report an application of ion wind in angular rate sensing. A new design of a jet flow
gyroscope using ion wind corona discharge is developed by conducting a numerical …

In this paper, we report a further study of flow-network generating four jet flows which
circulate in a sealed device to experimentally investigate the feasibility and efficiency of a …

We have developed and characterized a planar fluidic device consisting of a piezoelectric
(PZT) acutated valveless micropump and a p-type silicon hotwire as a flow sensor. The …

A piezoelectric-driven valveless micro jet pump with a novel channel structure has been
designed and fabricated. The simple structure micro jet pump consists of a lead zirconate …