Electron dynamics in low pressure capacitively coupled radio frequency discharges

S Wilczek, J Schulze, RP Brinkmann, Z Donkó… - Journal of Applied …, 2020 - pubs.aip.org
In low temperature plasmas, the interaction of the electrons with the electric field is an
important current research topic that is relevant for many applications. Particularly, in the low …

[HTML][HTML] Ion kinetic energy-and ion flux-dependent mechanical properties and thermal stability of (Ti, Al) N thin films

SK Aghda, DM Holzapfel, D Music, Y Unutulmazsoy… - Acta Materialia, 2023 - Elsevier
Ion-irradiation-induced changes in structure, elastic properties, and thermal stability of
metastable c-(Ti, Al) N thin films synthesized by high-power pulsed magnetron sputtering …

Predicting structure zone diagrams for thin film synthesis by generative machine learning

L Banko, Y Lysogorskiy, D Grochla, D Naujoks… - Communications …, 2020 - nature.com
Thin films are ubiquitous in modern technology and highly useful in materials discovery and
design. For achieving optimal extrinsic properties, their microstructure needs to be controlled …

Enhancing mechanical properties and cutting performance of industrially sputtered AlCrN coatings by inducing cathodic arc glow discharge

R Žemlička, M Alishahi, M Jílek, P Souček… - Surface and Coatings …, 2021 - Elsevier
The average ion energy per deposited atom (E d) is defined as the product of the ion energy
(E i) and ion-deposition flux ratio (J i/J d) in magnetron sputtering deposition. E d captures …

Dynamic impact resistance and scratch adhesion of AlCrN coatings sputtered using cathodic arc glow discharge

J Daniel, R Žemlička, M Alishahi, P Karvánková… - Coatings, 2023 - mdpi.com
AlCrN coatings, which are characterized by high hardness and good wear resistance, are
often used for drilling, milling, and punching tools. Therefore, the study of the behaviour of …

Mechanical properties of TiN films prepared in glow-arc transition region

H Liu, B Jiang, H Li - Surface Engineering, 2021 - Taylor & Francis
Titanium nitride (TiN) films were generated in the abnormal glow discharge (AGD) region
and the glow-arc transition discharge (GATD) region by varying target current density (Ja) in …

[PDF][PDF] Influence of point defects on the elastic properties and phase stability of cubic binary and ternary transition metal (aluminum) nitride thin films

S Karimi Aghda - 2023 - d-nb.info
In the first part of this thesis, a correlative experimental and theoretical model is developed to
study the influence of ion kinetic energy on the evolution of point defect structure in …

Nichtlokale und nichtlineare Elektronendynamik in kapazitiv gekoppelten Hochfrequenzplasmen

S Wilczek - 2020 - hss-opus.ub.ruhr-unibochum.de
RUB-Repository - Nichtlokale und nichtlineare Elektronendynamik in kapazitiv gekoppelten
Hochfrequenzplasmen Deutsch OPUS UB Bochum RUB » Bibliotheksportal Home Search …

[PDF][PDF] Combinatorial methods and artificial intelligence for microstructure optimization: from structure zone diagrams towards active learning of composition …

L Banko - scholar.archive.org
Thin films fabricated by reactive magnetron sputtering are of high importance for many
modern technologies and the discovery of new materials with exceptional properties is …