Development trends and perspectives of future sensors and MEMS/NEMS

J Zhu, X Liu, Q Shi, T He, Z Sun, X Guo, W Liu… - Micromachines, 2019 - mdpi.com
With the fast development of the fifth-generation cellular network technology (5G), the future
sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems …

Intelligent speech technologies for transcription, disease diagnosis, and medical equipment interactive control in smart hospitals: A review

J Zhang, J Wu, Y Qiu, A Song, W Li, X Li… - Computers in Biology and …, 2023 - Elsevier
The growing and aging of the world population have driven the shortage of medical
resources in recent years, especially during the COVID-19 pandemic. Fortunately, the rapid …

A review of MEMS capacitive microphones

SA Zawawi, AA Hamzah, BY Majlis, F Mohd-Yasin - Micromachines, 2020 - mdpi.com
This review collates around 100 papers that developed micro-electro-mechanical system
(MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive …

Design approaches of MEMS microphones for enhanced performance

MA Shah, IA Shah, DG Lee, S Hur - Journal of sensors, 2019 - Wiley Online Library
This paper reports a review about microelectromechanical system (MEMS) microphones.
The focus of this review is to identify the issues in MEMS microphone designs and …

Review of the applications of principles of insect hearing to microscale acoustic engineering challenges

L Díaz-García, B Latham, A Reid… - Bioinspiration & …, 2023 - iopscience.iop.org
When looking for novel, simple, and energy-efficient solutions to engineering problems,
nature has proved to be an incredibly valuable source of inspiration. The development of …

Bio-inspired rectangular shaped piezoelectric MEMS directional microphone

A Rahaman, A Ishfaque, H Jung, B Kim - IEEE Sensors Journal, 2018 - ieeexplore.ieee.org
The noise floor of a piezoelectric MEMS directional microphone largely depends on
piezoelectric materials and transducer modes. A careful choice of these parameters …

Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications

Z Zheng, C Wang, L Wang, Z Ji, X Song, PI Mak, H Liu… - Micromachines, 2024 - mdpi.com
The MEMS microphone is a representative device among the MEMS family, which has
attracted substantial research interest, and those tailored for human voice have earned …

Low-frequency bi-directional microphone based on a combination of bionic MEMS diaphragm and fiber acousto-optic transducer

D Ren, X Liu, M Zhang, R Gao, ZM Qi - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
This paper reports on a fiber-optic directional microphone with a bionic MEMS diaphragm for
low-frequency sound source localization. The diaphragm consists of two 3 mm mm wings …

Dual band MEMS directional acoustic sensor for near resonance operation

F Alves, R Rabelo, G Karunasiri - Sensors, 2022 - mdpi.com
In this paper, we report on the design and characterization of a microelectromechanical
systems (MEMS) directional sensor inspired by the tympana configuration of the parasitic fly …

Bionic MEMS for touching and hearing sensations: Recent progress, challenges, and solutions

C Ge, E Cretu - Journal of Bionic Engineering, 2022 - Springer
This paper reviews the recent progress on bionic microelectromechanical systems (MEMS)
used for touching and hearing sensations, focusing on the following three types of devices …