Foundations of optical diagnostics in low-temperature plasmas
R Engeln, B Klarenaar, O Guaitella - Plasma Sources Science …, 2020 - iopscience.iop.org
Over the past few decades many diagnostics have been developed to study the non-
equilibrium nature of plasma. These developments have given experimentalists the …
equilibrium nature of plasma. These developments have given experimentalists the …
Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges
The electron power absorption dynamics and plasma uniformity in low pressure capacitively
coupled RF discharges with structured electrodes are investigated by graphics processing …
coupled RF discharges with structured electrodes are investigated by graphics processing …
2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms
The effects of the simultaneous presence of two different types of plasma asymmetry, viz,
geometric and electrical, on low-pressure capacitively coupled argon discharges are studied …
geometric and electrical, on low-pressure capacitively coupled argon discharges are studied …
Control of electron dynamics, radical and metastable species generation in atmospheric pressure RF plasma jets by Voltage Waveform Tailoring
Atmospheric pressure capacitively coupled radio frequency discharges operated in He/N 2
mixtures and driven by tailored voltage waveforms are investigated experimentally using a …
mixtures and driven by tailored voltage waveforms are investigated experimentally using a …
Experimental investigations of the magnetic asymmetry effect in capacitively coupled radio frequency plasmas
M Oberberg, J Kallähn, P Awakowicz… - … Sources Science and …, 2018 - iopscience.iop.org
The electrical asymmetry effect allows control of the discharge symmetry, the DC self-bias,
and charged particle energy distribution functions electrically by driving a capacitive radio …
and charged particle energy distribution functions electrically by driving a capacitive radio …
[HTML][HTML] Magnetic field induced electron temperature inhomogeneity effects on discharge properties in cylindrical capacitively coupled plasmas
This paper presents the discharge properties of a novel cylindrical Capacitively Coupled
Plasma (CCP) discharge with an axisymmetric magnetic field. It is observed that with an …
Plasma (CCP) discharge with an axisymmetric magnetic field. It is observed that with an …
Ion energy distribution functions in a dual-frequency low-pressure capacitively-coupled plasma: experiments and particle-in-cell simulation
Abstract Low-pressure (< 10 s mTorr) multi-frequency capacitively coupled plasmas (CCPs)
are essential for critical plasma processing applications such as high aspect ratio dielectric …
are essential for critical plasma processing applications such as high aspect ratio dielectric …
Disrupting the spatio-temporal symmetry of the electron dynamics in atmospheric pressure plasmas by voltage waveform tailoring
Single frequency, geometrically symmetric Radio-Frequency (RF) driven atmospheric
pressure plasmas exhibit temporally and spatially symmetric patterns of electron heating …
pressure plasmas exhibit temporally and spatially symmetric patterns of electron heating …
Ion energy control via the electrical asymmetry effect to tune coating properties in reactive radio frequency sputtering
A knowledge-based understanding of the plasma-surface-interaction with the aim to
precisely control (reactive) sputtering processes for the deposition of thin films with tailored …
precisely control (reactive) sputtering processes for the deposition of thin films with tailored …
Optical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas
K Hernandez, A Press, MJ Goeckner… - Journal of Vacuum …, 2021 - pubs.aip.org
Phase resolved optical emission spectroscopy (PROES) measurements were combined with
measurements of the optical emission intensity (OEI) and electrical characteristics (RF …
measurements of the optical emission intensity (OEI) and electrical characteristics (RF …