Disclosed is a system and method for detecting the position of a wafer with respect to a
calibrated reference position. In one embodiment of the invention, sensors are used to …

Substrate transport systems, apparatus, and methods are described. The systems are
adapted to efficiently put or pick Substrates at a destination by rotating a boom linkage to a …

(57) ABSTRACT A double arm Substrate transportunit for transporting a work piece, Such as
a Semiconductor wafer, includes a robotic arm formed of a first forearm Supported by the tip …

A substrate transporting robot apparatus is disclosed which is adapted to transport a
substrate to and from a chamber of an electronic device processing system. The apparatus …

A substrate transport apparatus comprising a drive section, a controller, an upper arm,
forearm and substrate holder. A proximate end of the upper arm being rotatably mounted to …

A joystick apparatus includes a handgrip connected to a hinge mechanism by a rigid bar.
The hinge mechanism includes two living hinges that surround the bar and provide a …

An SCARA type robot comprises: an arm unit (14), whose one end is linked to a base (11) so
as to be pivotable in a horizontal plane, and which is capable of horizontally bending and …

Substrate transport systems and robot apparatus are provided. The systems are adapted to
pick or place a substrate at a destination by independently rotating an upper arm, a forearm …

A robot mechanism for controlling the position of a machine tool in a large-scale
manufacturing assembly includes six rotary axes and one linear axis. Secondary feedback …

In fabricating Semiconductors, Silicon wafers are often held in a cassette and then moved to
various pre programmed processing locations by a robotic handling System. The latter …