This study undertakes a comprehensive analytical and numerical investigation of the
nonlinear Kairat model, a significant evolution equation that governs a wide range of …

To test the applicability of scatterometry on EUV masks we measured a prototype EUV mask
both with an EUV scatterometer and a conventional scatterometer operated at 193 nm and …

In this study, we investigate the complex dynamics of the (1+ 1)-dimensional generalized
Burgers–Fisher (GBF) model, a nonlinear partial differential equation that encapsulates the …

Abstract The nonlinear Semilinear Dispersive-Fisher (SDF) model is an important equation
describing wave dynamics in dispersive media influenced by nonlinear and diffusive effects …

We discuss the solution of the inverse problem in scatterometry ie the determination of
periodic surface structures from light diffraction patterns. With decreasing details of …

Mueller matrix spectroscopic ellipsometry becomes increasingly important for determining
structural parameters of periodic line gratings. Because of the anisotropic character of …

Mit einem Scatterometer wird die an einer Probe gebeugte bzw. gestreute Strahlung
analysiert, ohne abbildende Optiken (Objektive) einzusetzen. Die Messungen sind …

The solution of the inverse problem in scatterometry, ie the determination of periodic surface
structures from light diffraction patterns, is incomplete without knowledge of the uncertainties …

Scatterometry is a common technique for the characterization of nano-structured surfaces.
The goal is to establish scatterometry as a traceable and absolute metrological method for …

Critical dimension and line edge roughness on photomask arrays are determined with
Mueller matrix spectroscopic ellipsometry. Arrays with large sinusoidal perturbations are …