The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known
technology for label-free sensing which holds promise as a technique for cheap, portable …

The development of polymer micromachining technologies that complement traditional
silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) …

The development of a SU-8-based microgripper that can operate in physiological ionic
solutions is presented. The electrothermally activated polymer gripper consists of two" hot …

In this paper we describe a new process for fabricating ultra-thick microfluidic devices
utilizing SU-8 50 negative photoresist (PR) by standard UV lithography. Instead of using a …

Since its introduction in the nineties, the negative resist SU‐8 has been increasingly used in
micro‐and nanotechnologies. SU‐8 has made the fabrication of high‐aspect ratio structures …

In this paper, SU-8 EPON-based photoresist (PR) polymerization optimization and its
possible microfluidic and MEMS applications are reported. First, the optimization results of …

The biocompatible polymer, SU-8, was used to microfabricate an interferometric pressure
sensor designed for invasive biomedical applications. Tests of the sensor in air and liquid …

In this paper, we report the optimization results of SU-8 EPON-based photoresist (PR)
polymerization and its possible microfluidic and MEMS applications. First, the optimization …

An innovative method for fabrication and rapid prototyping of high-aspect ratio
micromechanical components in photoresist is discussed. The photoresist is an epoxy …

This paper demonstrates the versatile application potential of SU8 photoepoxy for
micromechanical components. Its outstanding aspect ratio and attainable film thicknesses …