Adhesion-related failures occur in microelectromechanical systems (MEMS) when
suspended elastic members unexpectedly stick totheir substrates. This type of device failure …

Due to the smoothness of the surfaces in surface micromachining, large adhesion forces
between fabricated structures and the substrate are encountered. Four major adhesion …

Capacitive micromachined ultrasonic transducer (MUT) technology is a prime candidate for
next generation imaging systems. Medical and underwater imaging and the nondestructive …

Micromachines, particularly surface micromachines, often include smooth and chemically
active surfaces. Because the kinetic energies, start-up forces and torques involved in their …

The adhesion of polysilicon microstructures to their substrates is eliminated using a
relatively conformal hydrophobic fluorocarbon (FC) coating grown in a field-free zone of a …

Stiction failures in microelectromechanical systems (MEMS) occur when suspended elastic
members are unexpectedly pinned to their substrates. This type of device failure develops …

A surface micromachined micromagnetic actuator (also called a magnetic flap) as an
integrated part of an active micro electromechanical fluid control system is described. The …

A manipulator system for micro-object handling is presented and the design concepts used
for system construction are described. The manipulator consists of two robots (right-and left …

Atomic force microscopy (AFM) uses a scanning stylus to directly measure the surface
characteristics of a sample. Since AFM relies on nanoscale interaction between the probe …

Ultrasound is an imaging tool with a broad range of applications such as medical
diagnostics, underwater exploration and nondestructive evaluation of materials. As early as …