Fresnel lenses are important compact optical components, which are comprised of multiple
faceted concentric rings. These lenses are the most widely utilized diffractive optical element …

Abstract Direct Write Laser (DWL) Grayscale (GS) lithography has gathered attention as a
versatile technological solution to fabricate arbitrary and complex 2.5 D structures in …

In this paper, we study the variation of the thickness of patterned microchannel features in
photoresist (PR) by two-step photolithography. The final PR thickness is determined by the …

Grayscale mask creation has for the most part been restricted to over-simplified optical and
resist models usually based on a contrast curve approach. While this technique has proven …

Grayscale lithography is a relatively underutilized technique that enables fabrication of three-
dimensional (3-D) microstructures in photosensitive polymers (photoresists). By spatially …

A custom-built mask aligner (CBMA), which fundamentally covers all the key features of a
commercial mask aligner, while being low cost and light weight and having low power …

We build on the concept of hot intrusion embossing to develop a one-step fabrication
method for thermoplastic microfluidic channels containing integrated three-dimensional …

In this work, a statistical process control method is presented showing the accuracy and the
reliability obtained with of PMMA E-resist AR-P 672, using an Elphy Quantum Electron Beam …

We report a micromachining method for batch fabrication of three-dimensional curved
microstructures exhibiting in-plane principal axis with respect to the wafer substrate. The …

The novel use of a positive-tone photosensitive polyimide for the rapid production of
grayscale features using a maskless lithography system is demonstrated. The removal rate …