Diamond with an ultra-wide bandgap shows intrinsic performance that is extraordinarily
superior to those of the currently available wide-bandgap semiconductors for deep …

Today, the vast majority of microelectromechanical system (MEMS) sensors are
mechanically rigid and therefore suffer from disadvantages when used in intimately …

This experimental study presents the operation of pressure sensors made from low-
temperature flexible substrates. Design, simulation, fabrication, and characterization are …

The rapid development of the embroidery of conductive threads into textiles and associated
biomedical sensors and on-body antennas has given rise to many healthcare and …

A bio-inspired absolute pressure sensor network has been developed. Absolute pressure
sensors, distributed on multiple silicon islands, are connected as a network by stretchable …

This paper reports on the design and optimization of a current mirror sensing based
MOSFET embedded pressure sensor. A resistive loaded n-channel MOSFET based current …

Flexible pressure sensors and temperature sensors are widely used in various fields
because of their advantages in high flexibility, good shape retention and extremely small …

This paper reviews the most recent results on the fabrication and characterization of a
variety of microelectromechanical (MEMS) based sensors fabricated on flexible polymer …

MEMS fabricated on polymer substrates can allow for a range of new applications that
require bending or lightweight, unbreakable substrates. The surface micromachining of …

Pressure measurement is certainly one of the most mature applications of Micro Electro
Mechanical Systems. This is made possible by the advantage of batch fabrication …