[PDF][PDF] Study of Luminescent Silicon-Rich Silicon Nitride and Cerium and Terbium Doped Silicon Oxide Thin Films

PR Wilson - 2013 - researchgate.net
Silicon nanostructures formed in silicon-rich silicon nitride (SRSN) and cerium and terbium
doped silicon oxide thin films grown using different types of plasma-enhanced chemical …

Influence of hydrogen passivation on the luminescence of Si quantum dots embedded in Si3Nx

CC Cadogan, LV Goncharova, PJ Simpson… - Journal of Vacuum …, 2016 - pubs.aip.org
Silicon quantum dots (Si-QDs) of various diameters were formed by annealing of Si-rich
silicon nitride (Si 3 N x) films synthesized using plasma-enhanced chemical vapor …