Virtual metrology (VM) involves estimating a product's quality directly from production
process data without physically measuring it. This enables the product quality of each unit of …

Abstract Advanced Process Control (APC) has become an increasingly pressing issue for
the semiconductor industry, particularly in the new era of sub-5nm process technology. To …

Virtual metrology (VM) has been employed to improve the performance of advanced process
control for semiconductor manufacturing. A number of VM models have been proposed to …

Virtual metrology (VM) is drawing more and more attention in the recent research of wafer to
wafer control for semiconductor manufacturing. Although many different approaches for VM …

Complex networks have become an active interdisciplinary field of research inspired by the
empirical study of various networks. A subway network is a real-world example of complex …

In semiconductor manufacturing, the chemical mechanical planarization (CMP) process
produces higher thickness variability in the edge area of the wafer than that in the center …

The wear state of a cutting tool is an important factor which affects machining quality.
Therefore, monitoring tool wear is extremely essential to ensure workpiece quality and …

Ink-jet 3-D printing is a promising additive manufacturing technology with the potential for
impacting a wide variety of industries. In typical ink-jet 3-D printing, the part is built up by …

In this study, we developed a hybrid machine learning technique by combining appropriate
classification and regression models to address challenges in producing high-mobility …

The prediction of the average Material Removal Rate (MRR) for Chemical Mechanical
Planarization (CMP) process has been recognized to be a critical factor of Virtual Metrology …