Transduction in M/NEMS-Actuation and Sensing: A Review
V Pachkawade - IEEE Sensors Journal, 2024 - ieeexplore.ieee.org
This article covers rigorous overview of diverse transduction principles that have enabled
successful development of micro/nanoelectromechanical systems (MEMS/NEMS) devices …
successful development of micro/nanoelectromechanical systems (MEMS/NEMS) devices …
NEMS based actuation and sensing
V Pachkawade - Authorea Preprints, 2023 - techrxiv.org
This article offers rigorous overview of diverse transduction methods that have enabled
successful development of Micro/Nanoelectromechanical Systems (MEMS/NEMS) …
successful development of Micro/Nanoelectromechanical Systems (MEMS/NEMS) …