Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

This paper reports an acceleration sensing method based on two weakly coupled
resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on …

Abstract Microsystems (or Micro Electro Mechanical Systems, MEMS) are important
components of many popular products in the consumer market and are one of the enabling …

According to their inherent characteristics, MEMS resonant accelerometers are suitable for
low-frequency, low-g acceleration measurement. In this paper, we report a MEMS …

This letter presents a high-performance resonant MEMS accelerometer comprising of a
single force-sensitive vibrating beam element sandwiched between two inertial masses. The …

A sensitive micromachined resonant accelerometer that exhibits extremely low noise floor
and excellent bias stability is presented for future application of moving-base gravimetry. An …

This work demonstrates a unique temperature-compensated differential resonant
accelerometer fabricated in a wafer-scale encapsulation process. By utilizing a pair of ultra …

Micromachined hemispherical shell resonators (HSRs) can be used in high accuracy
vibratory gyroscopes. These resonators need to have very low energy loss to achieve very …

Modern navigation systems integrate the global positioning system (GPS) with an inertial
navigation system (INS), which complement each other for correct attitude and velocity …

Micromachined resonant accelerometers (MRAs), especially those devices fabricated by
silicon on glass technology, suffer from temperature drift error caused by inherent thermal …