Microelectromechanical systems (MEMS) technologies are evolving at a rapid rate with
increasing activity in the design, fabrication, and commercialization of a wide variety of …

MicroElectroMechanical Systems (MEMS) technology offers considerable potential
throughout the manufacturing sector, because of certain intrinsic advantages in terms of low …

Interfacial adhesion and friction are important factors in determining the performance and
reliability of microelectro-mechanical systems. We demonstrate that the adhesion of …

Where conventional testing and inspection techniques fail at the micro-scale, optical
techniques provide a fast, robust, and relatively inexpensive alternative for investigating the …

Written by a highly respected expert in the field, this book provides the first comprehensive
coverage of SHM. It reviews the various types of sensors currently used in SHM and …

Silicon (Si) microfabrication techniques, derived from the microelectronics industry, have
enabled the development and commercialization of microelectromechanical systems …

This work demonstrates a polycrystalline silicon surface-micromachined inchworm actuator
that exhibits high-performance characteristics such as large force (/spl plusmn/0.5 …

A nanoscale mechanical deformation measurement method was employed to obtain the
Young's modulus and Poisson's ratio of polycrystalline silicon for Microelectromechanical …

One of the most important issues facing the continued development and application of
microelectromechanical systems (MEMS) is that of adhesion and friction between …

Collagen is the main structural protein in vertebrate biology, determining the mechanical
behavior of connective tissues such as tendon, bone and skin. Although extensive efforts in …