Laser micro‐welding is an advanced manufacturing method today applied in various
domains. However, important physical limitations have prevented so far to demonstrate its …

Abstract The LHCb VELO Upgrade I, currently being installed for the 2022 start of LHC Run
3, uses silicon microchannel coolers with internally circulating bi-phase CO 2 for thermal …

Important challenges remain to achieve reliable three-dimensional laser writing inside
semiconductors as important as silicon. Experiments show that nonlinear energy deposition …

Silicon is among the most important technological materials with extensive uses in the fields
of microelectronics, microfluidics and micromechanics. Fabrication of the different silicon …

Anodic bonding is broadly utilized to realize the structure support and electrical connection
in the process of fabrication and packaging of MEMS devices, and the mechanical and …