Differential MEMS microphone

M Kuntzman, W Conklin, SB Lee - US Patent 10,362,408, 2019 - Google Patents
The present disclosure relates generally to microphones and related components. One
example micro electro mechanical system (MEMS) motor includes a first diaphragm; a …

System and method for an integrated transducer and temperature sensor

U Krumbein, A Dehe - US Patent 9,967,679, 2018 - Google Patents
According to embodiment, a transducer includes a microfabricated element integrated on a
single die and an interface IC coupled to the microfabricated element. The microfabricated …

MEMS microphone, apparatus comprising a MEMS microphone and method for fabricating a MEMS microphone

A Walther, A Dehe - US Patent 10,129,676, 2018 - Google Patents
A MEMS microphone and a method for manufacturing a MEMS microphone are disclosed.
Embodiments of the invention provide a MEMS microphone including a MEMS microphone …

Differential sensing acoustic sensor

ML Chan, MJ Daneman, EP Ata, X Li, M Lim - US Patent 9,344,808, 2016 - Google Patents
(57) ABSTRACT A MEMS device includes a first plate coupled to a second plate and a fixed
third plate formed on a first substrate. The first and second plates are displaced in the …

MEMS microphone

A Kamijima, T Inoue - US Patent 10,917,728, 2021 - Google Patents
(57) ABSTRACT A MEMS microphone includes a substrate, and a first conversion portion
and a second conversion portion pro vided on the substrate, the first conversion portion and …

Capacitive microphone with insulated conductive plate

S Barzen, A Brockmeier, M Fueldner, S Pindl… - US Patent …, 2016 - Google Patents
A capacitive microphone may include a housing, a membrane, and a first backplate, wherein
a first insulating layer may be disposed on a first side of the first backplate facing the …

Microphone assembly and method of manufacturing a microphone assembly

G Rocca - US Patent 10,165,342, 2018 - Google Patents
A microphone assembly and a method for manufacturing a microphone assembly are
disclosed. In an embodiment, the microphone assembly includes a MEMS dual backplate …

Semiconductor device, microphone and method for producing a semiconductor device

S Barzen, W Friza, M Fueldner - US Patent 10,464,807, 2019 - Google Patents
A semiconductor device is proposed. The semiconductor device comprises a membrane
structure having an opening. Furthermore, the semiconductor device comprises a first …

MEMS microphone module

A Kamijima, T Inoue - US Patent 11,350,221, 2022 - Google Patents
A MEMS microphone includes a substrate, and a first conversion portion and a second
conversion portion provided on the substrate, the first conversion portion and the second …

Microphone and manufacture thereof

G Fu - US Patent 11,510,011, 2022 - Google Patents
A microphone and its manufacturing method, relating the semiconductor techniques, are
presented. The microphone comprises: a substrate comprising an opening, a first elec trode …