Differential MEMS microphone
M Kuntzman, W Conklin, SB Lee - US Patent 10,362,408, 2019 - Google Patents
The present disclosure relates generally to microphones and related components. One
example micro electro mechanical system (MEMS) motor includes a first diaphragm; a …
example micro electro mechanical system (MEMS) motor includes a first diaphragm; a …
System and method for an integrated transducer and temperature sensor
U Krumbein, A Dehe - US Patent 9,967,679, 2018 - Google Patents
According to embodiment, a transducer includes a microfabricated element integrated on a
single die and an interface IC coupled to the microfabricated element. The microfabricated …
single die and an interface IC coupled to the microfabricated element. The microfabricated …
MEMS microphone, apparatus comprising a MEMS microphone and method for fabricating a MEMS microphone
A Walther, A Dehe - US Patent 10,129,676, 2018 - Google Patents
A MEMS microphone and a method for manufacturing a MEMS microphone are disclosed.
Embodiments of the invention provide a MEMS microphone including a MEMS microphone …
Embodiments of the invention provide a MEMS microphone including a MEMS microphone …
Differential sensing acoustic sensor
ML Chan, MJ Daneman, EP Ata, X Li, M Lim - US Patent 9,344,808, 2016 - Google Patents
(57) ABSTRACT A MEMS device includes a first plate coupled to a second plate and a fixed
third plate formed on a first substrate. The first and second plates are displaced in the …
third plate formed on a first substrate. The first and second plates are displaced in the …
MEMS microphone
A Kamijima, T Inoue - US Patent 10,917,728, 2021 - Google Patents
(57) ABSTRACT A MEMS microphone includes a substrate, and a first conversion portion
and a second conversion portion pro vided on the substrate, the first conversion portion and …
and a second conversion portion pro vided on the substrate, the first conversion portion and …
Capacitive microphone with insulated conductive plate
S Barzen, A Brockmeier, M Fueldner, S Pindl… - US Patent …, 2016 - Google Patents
A capacitive microphone may include a housing, a membrane, and a first backplate, wherein
a first insulating layer may be disposed on a first side of the first backplate facing the …
a first insulating layer may be disposed on a first side of the first backplate facing the …
Microphone assembly and method of manufacturing a microphone assembly
G Rocca - US Patent 10,165,342, 2018 - Google Patents
A microphone assembly and a method for manufacturing a microphone assembly are
disclosed. In an embodiment, the microphone assembly includes a MEMS dual backplate …
disclosed. In an embodiment, the microphone assembly includes a MEMS dual backplate …
Semiconductor device, microphone and method for producing a semiconductor device
S Barzen, W Friza, M Fueldner - US Patent 10,464,807, 2019 - Google Patents
A semiconductor device is proposed. The semiconductor device comprises a membrane
structure having an opening. Furthermore, the semiconductor device comprises a first …
structure having an opening. Furthermore, the semiconductor device comprises a first …
MEMS microphone module
A Kamijima, T Inoue - US Patent 11,350,221, 2022 - Google Patents
A MEMS microphone includes a substrate, and a first conversion portion and a second
conversion portion provided on the substrate, the first conversion portion and the second …
conversion portion provided on the substrate, the first conversion portion and the second …
Microphone and manufacture thereof
G Fu - US Patent 11,510,011, 2022 - Google Patents
A microphone and its manufacturing method, relating the semiconductor techniques, are
presented. The microphone comprises: a substrate comprising an opening, a first elec trode …
presented. The microphone comprises: a substrate comprising an opening, a first elec trode …