Effect of transition metals co-dopant on eliminating boron and phosphorous impurities from silicon
DW Boukhvalov, KA Abdullin… - Separation and …, 2024 - Elsevier
In this work, we report the results of the systematic studies of the interactions between boron
and phosphorous impurities in silicon matrix and transitional metals (TM) co-dopants: iron …
and phosphorous impurities in silicon matrix and transitional metals (TM) co-dopants: iron …