Report on laser-induced fluorescence transitions relevant for the microelectronics industry and sustainability applications
A wide variety of feed gases are used to generate low-temperature plasmas for the
microelectronics and the sustainability applications. These plasmas often have a complex …
microelectronics and the sustainability applications. These plasmas often have a complex …
Enhanced boron doping of thin diamond films grown in deuterium-rich microwave plasma
The boron-doped diamond thin films were growth in deuterium rich microwave plasma in
CVD process. The mechanism of influence of plasma composition on boron doping level …
CVD process. The mechanism of influence of plasma composition on boron doping level …