We present a novel non-contact metrology approach for on-wafer characterization of sub-
millimeter-wave devices, components, and integrated circuits. Unlike existing contact probes …

The electromagnetic design and characterization of a micromachined submillimeter-wave
on-wafer probe is presented. The mechanical design and fabrication of the probe is …

In this article, we present a new type of waveguide ground-signal-ground (GSG) probe for
millimeter-wave (mmWave) on-wafer measurements. The proposed design integrates a …

This paper introduces a novel free-space terahertz (THz) characterization setup featuring an
electronic-based technique and miniature additive-manufactured hemispherical lens …

This paper presents a micromachined probe for on-wafer measurements of circuits in the
WR-1.0 waveguide band (0.75-1.1 THz). The probe shows a measured insertion loss of less …

Microfabricated chip-edge microcantilevers are commonly used as surface probes, eg in
near-field microscopy. Such probes normally function in the low-deflection regime, where …

This article presents a state-of-art review of on-wafer S-parameter characterization of THz
silicon transistors for compact modelling purpose. After, a brief review of calibration/de …

An improved micromachined on-wafer probe covering frequencies 500-750 GHz is
demonstrated in this paper to address sub-millimeter-wave integrated-circuit testing …

This paper presents a comprehensive overview of the development and utilization of a
micromachined silicon-on-insulator (SOI) fabrication process that has enabled the …

This chapter focuses on the generation of continuous waves in the Terahertz (THz)
frequency range by using the optical heterodyne, also called photomixing of two slightly …