Coupling secondary ion mass spectrometry and atom probe tomography for atomic diffusion and segregation measurements
A Portavoce, K Hoummada… - Microscopy and …, 2019 - academic.oup.com
For a long time, secondary ion mass spectrometry (SIMS) was the only technique allowing
impurity concentrations below 1 at% to be precisely measured in a sample with a depth …
impurity concentrations below 1 at% to be precisely measured in a sample with a depth …