Configurable post-release stress-engineering of surface micro-machined MEMS structures
R Majumdar, I Paprotny - Journal of Microelectromechanical …, 2017 - ieeexplore.ieee.org
Stress-engineering is the method for inducing curvature in initially planar micromachined
structures by the deposition of a stressor layer. Post-release stress engineering occurs when …
structures by the deposition of a stressor layer. Post-release stress engineering occurs when …
A large range of motion 3D MEMS scanner with five degrees of freedom
Here, we discuss a novel, mixed mode 3D XYZ scanner built within a single foundry
process. The device has a large range of motion in X, Y, and Z (14.1 μm in X and Y and 97.9 …
process. The device has a large range of motion in X, Y, and Z (14.1 μm in X and Y and 97.9 …
Development of parallel-plate-based MEMS tunable capacitors with linearized capacitance–voltage response and extended tuning range
This paper presents a design technique that can be used to linearize the capacitance–
voltage (C–V) response and extend the tuning range of parallel-plate-based MEMS tunable …
voltage (C–V) response and extend the tuning range of parallel-plate-based MEMS tunable …
Linearization and tunability improvement of MEMS capacitors using flexible electrodes and nonlinear structural stiffness
M Shavezipur, P Nieva, SM Hashemi… - Journal of …, 2012 - iopscience.iop.org
This paper proposes solutions for high nonlinearity and structural instability in
electrostatically actuated MEMS capacitors. The proposed designs use the flexibility of the …
electrostatically actuated MEMS capacitors. The proposed designs use the flexibility of the …
An effective approach for restraining galvanic corrosion of polycrystalline silicon by hydrofluoric-acid-based solutions
Y Liu, J Xie, M Zhang, J Yang… - journal of …, 2011 - ieeexplore.ieee.org
This paper presents an effective method to restrain galvanic corrosion of polycrystalline
silicon (polysilicon) that is electrically coupled with noble metals of microelectromechanical …
silicon (polysilicon) that is electrically coupled with noble metals of microelectromechanical …
An effective approach for restraining electrochemical corrosion of polycrystalline silicon caused by an HF-based solution and its application for mass production of …
Y Liu, J Xie, H Zhao, W Luo, J Yang… - Journal of …, 2012 - iopscience.iop.org
This paper presents a novel method to effectively protect the structural material
polycrystalline silicon (polysilicon) from electrochemical corrosion, which often occurs when …
polycrystalline silicon (polysilicon) from electrochemical corrosion, which often occurs when …
[图书][B] Fabrication and study of AC electro-osmotic micropumps
X Guo - 2013 - search.proquest.com
In this thesis, microelectrode arrays of micropumps have been designed, fabricated and
characterized for transporting microfluid by AC electro-osmosis (ACEO). In particular, the 3D …
characterized for transporting microfluid by AC electro-osmosis (ACEO). In particular, the 3D …
Effect of enhanced ion transfer in process-induced electrochemical corrosion on surface morphology and tribological properties
EC Anderson, AL Macuk… - Journal of …, 2017 - ieeexplore.ieee.org
The presence of both gold and polycrystalline silicon in a given microelectromechanical
systems (MEMS) device can profoundly impact surface properties through an …
systems (MEMS) device can profoundly impact surface properties through an …
A simple method for effectively restrain electrochemical corrosion of polycrystalline silicon by HF-based solutions
J Xie, YF Liu, ML Zhang, JL Yang… - 2011 IEEE 24th …, 2011 - ieeexplore.ieee.org
A simple method is described to protect polycrystalline silicon (polysilicon) from
electrochemical corrosion which often happens when the Micro-Electro-Mechanical systems …
electrochemical corrosion which often happens when the Micro-Electro-Mechanical systems …