Local pressure calibration method of inductively coupled plasma generator based on laser Thomson scattering measurement
J Sun, YQ Liu, Y Zheng, J Shi, Y Li, Y Zhao, X Zhang… - Scientific Reports, 2022 - nature.com
Based on laser Thomson scattering (TS) measurements and finite element method (FEM)
simulations of electron density in inductively coupled plasma (ICP), the simulated local …
simulations of electron density in inductively coupled plasma (ICP), the simulated local …
Measurements of Electron Density, Temperature, and Absolute Metastable 1s and 1s States of Ar in Ar–CO DC Discharge Employing Emission Spectroscopy
JR Legorreta, FB Yousif, J Escalona… - … on Plasma Science, 2023 - ieeexplore.ieee.org
This article deals with the investigation of dc plasma discharge of Ar–CO gas mixture in
which the relative electron density and absolute temperature were measured. Relative …
which the relative electron density and absolute temperature were measured. Relative …
Langmuir probe measurements of an RF driven high-density inductively coupled argon plasma
W Ni, G Song, D Liu - IOP Conference Series: Earth and …, 2019 - iopscience.iop.org
In this paper, a high-density inductively coupled argon plasma was generated by an RF
power supply, and the plasma density, electron temperature, and plasma potential were …
power supply, and the plasma density, electron temperature, and plasma potential were …
Optimization of discharge antenna turn and modulation of EEPFs and plasma parameters in dual-frequency cylindrical ICP source at different gas pressures
Y Hua, Z Hao, C Ren, J Song - Journal of Applied Physics, 2020 - pubs.aip.org
This paper deals with the optimization of the number of discharge antenna turns N, mainly
including the effect of N on the plasma parameters [plasma density ne, effective electron …
including the effect of N on the plasma parameters [plasma density ne, effective electron …
[PDF][PDF] A global model for the inductively coupled rf discharges in Ar/H2 mixture
H Tebani, D BENYOUCEF - Przegląd Elektrotechniczny, 2021 - pe.org.pl
This paper presents the simulation of the rf Inductively Coupled Plasma (ICP) characteristics
in the Ar/H2 mixture at low pressure, within a cylindrical stainless steel chamber. The global …
in the Ar/H2 mixture at low pressure, within a cylindrical stainless steel chamber. The global …
Photo-detachment of negative ions in Ar-CO2 dc discharge employing Langmuir probe
J Rodríguez, FB Yousif, BE Fuentes, F Vázquez… - Physics of …, 2018 - pubs.aip.org
The electronegativity of the A r− CO 2 gas mixture was investigated, and the total relative
negative oxygen ion density O 2−+ O− in the bulk of a dc discharge has been determined …
negative oxygen ion density O 2−+ O− in the bulk of a dc discharge has been determined …
Metastable argon atoms under significant neutral depletion in helicon plasmas by laser-induced fluorescence
We study the spatial distribution of the metastable-state argon atoms in high density helicon
plasmas by means of laser-induced fluorescence. It is observed that the neutral argon in …
plasmas by means of laser-induced fluorescence. It is observed that the neutral argon in …
Atomic Layer Deposition of Cadmium Telluride for the Passivation of Mercury Cadmium Telluride
JW Pattison - 2021 - search.proquest.com
Mercury cadmium telluride (MCT) is an important infrared (IR) detector material due to high
quantum efficiency and the ability to tune the bandgap, covering important IR wavelengths …
quantum efficiency and the ability to tune the bandgap, covering important IR wavelengths …