The present invention provides a proximity micro-electro mechanical system (MEMS) device
that utilizes a gaseous capacitive gap. The MEMS comprises a Second electrode …

Multiple electrode element capacitive micromachined ultrasonic transducer (“cMUT”)
devices and fabrication methods are provided. A cMUT device generally comprises a top …

Harmonic capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication
methods are provided. In a preferred embodiment, a harmonic cMUT device generally …

3,772,537 3,796,976 4,317,611 4,516,091 4,554,519 4,581,624 4,598,585 4,662,746
4,692,727 4,710,732 4,736,202 4,747,670 4,789,803 4,794,370 4,826,131 4,857,757 …

A tunable capacitor having low loss and a corresponding high Q is provided. The tunable
capacitor includes first and second substrates having first and second capacitor plates …

Asymmetric membrane capacitive micromachined ultrasonic transducer (“cMUT”) devices
and fabrication methods are provided. In a preferred embodiment, a cMUT device according …

(65) Prior Publication Data(Continued) US 2005/0203397 A1 Sep. 15, 2005 Primary
Examiner Thomas MDougherty (74) Attorney, Agent, or Firm Troutman Sanders LLP. Ryan …

A single pole, double throw micro-electromechanical (MEM) switch. The inventive switch
includes a first contact providing a first terminal of the switch. A second contact provides a …

Harmonic capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication
methods are provided. In a preferred embodiment, a harmonic cMUT device generally …

A variable capacitor having low loSS and a correspondingly high Q is provided. In addition
to a substrate, the variable capacitor includes at least one Substrate electrode and a …