TiNi-based thin films in MEMS applications: a review

Y Fu, H Du, W Huang, S Zhang, M Hu - Sensors and Actuators A: Physical, 2004 - Elsevier
TiNi thin films have attracted much attention in recent years as intelligent and functional
materials because of their unique properties. TiNi thin film based micro-actuators will …

Shape memory alloy thin films and heterostructures for MEMS applications: A review

N Choudhary, D Kaur - Sensors and Actuators A: Physical, 2016 - Elsevier
In recent years, shape memory alloy (SMA) thin films have attracted significant attention from
the scientific community and industry for their potential applications in the field of smart …

[HTML][HTML] Shape memory alloy actuators for haptic wearables: A review

Q Liu, S Ghodrat, G Huisman, KMB Jansen - Materials & Design, 2023 - Elsevier
Devices delivering sophisticated and natural haptic feedback often encompass numerous
mechanical elements, leading to increased sizes and wearability challenges. Shape …

MEMS applications of NiTi based shape memory alloys: a review

M Mehrpouya, H Cheraghi Bidsorkhi - Micro and Nanosystems, 2016 - ingentaconnect.com
Shape Memory Alloys (SMAs), famous class of smart materials with unique functional and
intelligence properties, have attracted much attention in recent decades. These materials …

A comprehensive survey on microgrippers design: Operational strategy

A Dochshanov, M Verotti… - Journal of …, 2017 - asmedigitalcollection.asme.org
This article provides an overview of the operational strategies adopted in microgrippers
design. The review covers microgrippers recently proposed in Literature, some of which …

[HTML][HTML] Micromachined shape-memory-alloy microactuators and their application in biomedical devices

MA Zainal, S Sahlan, MS Mohamed Ali - Micromachines, 2015 - mdpi.com
Shape memory alloys (SMAs) are a class of smart materials characterized by shape memory
effect and pseudo-elastic behavior. They have the capability to retain their original form …

[图书][B] Nanostructured thin films and coatings: mechanical properties

S Zhang - 2010 - taylorfrancis.com
Authored by leading experts from around the world, the three-volume Handbook of
Nanostructured Thin Films and Coatings gives scientific researchers and product engineers …

How to grow single-crystalline and epitaxial NiTi films in (100)-and (111)-orientation

K Lünser, A Undisz, K Nielsch… - Journal of Physics …, 2023 - iopscience.iop.org
Understanding the martensitic microstructure in nickel–titanium (NiTi) thin films helps to
optimize their properties for applications in microsystems. Epitaxial and single-crystalline …

Sputtering deposited TiNi films: relationship among processing, stress evolution and phase transformation behaviors

Y Fu, H Du, S Zhang - Surface and Coatings Technology, 2003 - Elsevier
TiNi films were prepared by co-sputtering a Ti50Ni50 target and a Ti target under different
process parameters. Stress in TiNi film on silicon substrate were evaluated using curvature …

The relationships between sputter deposition conditions, grain size, and phase transformation temperatures in NiTi thin films

M Kabla, H Seiner, M Musilova, M Landa, D Shilo - Acta Materialia, 2014 - Elsevier
Sputter-deposited NiTi films on full 100 mm wafers exhibit different phases, depending on
the wafer region. Comprehensive characterization and analysis show that, unlike the …