Optical interferometry is a powerful tool for measuring and characterizing areal surface
topography in precision manufacturing. A variety of instruments based on optical …

Demodulation of steep abrupt heights is a challenging task in interferometry because
scattering from the steep region is typically weak. In this paper, we enhance the steepness …

Multiple reflections and nonlinearity of phase modulating need to be compensated to
accurately profile the surface of the glass plate using wavelength-modulated interferometry …

In this study we propose an annular-beam dual-detection confocal reflectance microscopy
(ADDCRM) method for high-speed three-dimensional surface measurements without …

Spectral interferometry is becoming a popular method of performing dimensional
measurements, eg of surfaces, but such devices require pre-calibration of their …

White light scanning interferometry is a commonly used optical measurement method for
three-dimensional (3D) surface profiles. In the case of large phase errors, accurate height …

The phase slope method which estimates height through fringe pattern frequency and the
algorithm which estimates height through the fringe phase are the fringe analysis algorithms …

The Fourier transform (FT), the nonlinear least-squares algorithm (NLSA), and eigenvalue
decomposition algorithm (EDA) are used to evaluate the phase field in depth-resolved …

In this paper, a rough sample tested interferometrically by intermediate and high coherent
red light is demodulated by the wavelet transform (WT) and Fourier transform (FT). The …

Wavelength scanning interferometry (WSI) is a promising imaging technique for measuring
the three-dimensional structure of the inner tissues in biomedicine. One of the important …