Optical wafer defect inspection at the 10 nm technology node and beyond

J Zhu, J Liu, T Xu, S Yuan, Z Zhang… - … Journal of Extreme …, 2022 - iopscience.iop.org
The growing demand for electronic devices, smart devices, and the Internet of Things
constitutes the primary driving force for marching down the path of decreased critical …

Noncontact nondestructive ultrasonic techniques for manufacturing defects monitoring in composites: a review

H Mortada, S El Mousharrafie… - Structural Health …, 2024 - journals.sagepub.com
Composite materials are widely used in most industries due to their high specific strength,
specific stiffness, and their relatively lighter weight compared to other traditional materials …

Real-time tiny part defect detection system in manufacturing using deep learning

J Yang, S Li, Z Wang, G Yang - IEEe Access, 2019 - ieeexplore.ieee.org
We adopted actual intelligent production requirements and proposed a tiny part defect
detection method to obtain a stable and accurate real-time tiny part defect detection system …

[HTML][HTML] Thickness and surface profiling of optically transparent and reflecting samples using lens-less self-referencing digital holographic microscopy

S Utadiya, V Trivedi, K Bhanderi, M Joglekar… - Applied Surface Science …, 2023 - Elsevier
Thickness and surface profiling of transparent/semi-transparent specimens are vital in
various applications, including electronics, optics, healthcare, and biotechnology. Surface …

Portable digital holographic camera featuring enhanced field of view and reduced exposure time

R Kumar, G Dwivedi, O Singh - Optics and Lasers in Engineering, 2021 - Elsevier
Digital holography offers a full-field and high-resolution technique for non-destructive testing
and inspection of electro-opto-mechanical components and products. But as holography is …

Common-path lensless digital holographic microscope employing a Fresnel biprism

S Ebrahimi, M Dashtdar, A Anand, B Javidi - Optics and lasers in …, 2020 - Elsevier
Digital holographic (DH) microscopy is a nondestructive quantitative method for studying
micron-sized samples with a special application in medicine, biology and materials science …

Measurement of liquid refractive index by quantitative phase reconstruction of single frame dual-wavelength digital hologram

M Huang, C Sun, H Qin, Z Jiang - Measurement, 2023 - Elsevier
A measurement method of liquid's refractive index by means of single-shot dual-wavelength
off-axis digital holographic microscopy system and a microfluidic chip is presented. The …

Digital holographic imaging of thermal signatures and its use in inhomogeneity identification

S Utadiya, V Trivedi, G Sheoran, A Srivastava… - Optics and Lasers in …, 2023 - Elsevier
Thermal diffusion results in spatiotemporally evolving temperature distribution in material
mediums. In dielectric mediums it will also lead to change in local refractive index. Digital …

[PDF][PDF] 基于数字全息扫描成像的划痕缺陷全场三维测试

冯方, 田爱玲, 刘丙才, 冯丹青, 陈晨… - Chinese Journal of …, 2020 - researching.cn
摘要为实现光学元件表面疵病的三维全场测量, 提出了一种数字全息显微扫描成像的检测方法.
该方法基于数字全息角谱数值重建算法, 获得光学元件表面划痕的相位分布 …

Rapid deformation analysis in digital holographic interferometry using graphics processing unit accelerated Wigner–Ville distribution

A Vishnoi, G Rajshekhar - Applied optics, 2019 - opg.optica.org
High-speed measurement of temporally varying displacement derivatives of a deformed
object is an important and challenging problem in precision metrology. This paper proposes …