Fabrication challenges for indium phosphide microsystems

NP Siwak, XZ Fan, R Ghodssi - Journal of Micromechanics and …, 2015 - iopscience.iop.org
From the inception of III–V microsystems, monolithically integrated device designs have
been the motivating drive for this field, bringing together the utility of single-chip …

Focused ion beam milling of single-crystal sapphire with A-, C-, and M-orientations

Q Wen, X Wei, F Jiang, J Lu, X Xu - Materials, 2020 - mdpi.com
Sapphire substrates with different crystal orientations are widely used in optoelectronic
applications. In this work, focused ion beam (FIB) milling of single-crystal sapphire with A-, C …

MEMS‐and MOEMS‐based near‐infrared spectrometers

J Antila, M Tuohiniemi, A Rissanen… - Encyclopedia of …, 2006 - Wiley Online Library
The trend in near‐infrared (NIR) spectroscopy is to go toward on‐site, in‐field, on‐the‐go
applications with calibration‐free instruments and off‐the‐shelf chemometrics software …

Enhanced photonic nanojets for submicron patterning

Z Zhou, H Ali, Z Hou, W Xue, Y Cao - Journal of Central South University, 2022 - Springer
Photonic nanojets (PNJs) have a wide range of applications in laser processing,
nanolithography, optical high-density storage, super-resolution microscopy, and other fields …

MOEMS Fabry–Pérot interferometer with point-anchored Si-air mirrors for middle infrared

M Tuohiniemi, A Näsilä, A Akujärvi… - … of Micromechanics and …, 2014 - iopscience.iop.org
We studied how a micromachined Fabry–Pérot interferometer, realized with wide point-
anchored Si/air-gap reflectors, performs at the middle-infrared. A computational analysis of …

Damage protection from focused ion beam process toward nanocavity-implemented compound semiconductor nanowire lasers

M Takiguchi, G Zhang, S Sasaki, K Tateno… - …, 2023 - iopscience.iop.org
A focused ion beam (FIB) can precisely mill samples and freely form any nanostructure even
on surfaces with curvature, like a nanowire surface, which are difficult to implement by using …

Light extraction from scintillating crystals enhanced by photonic crystal structures patterned by focused ion beam

P Modrzynski, T Gotszalk, A Knapitsch… - … on Nuclear Science, 2016 - ieeexplore.ieee.org
“Photonic Crystals (PhC)” have been used in a variety of fields as a structure for improving
the light extraction efficiency from materials with high index of refraction. In previous work we …

利用亚波长矩形金属光栅稳定980 nm 高功率垂直腔面发射激光器偏振

张祥伟, 宁永强, 秦莉, 刘云, 王立军 - Chinese Journal of …, 2013 - opticsjournal.net
摘要利用亚波长矩形金属光栅的偏振特性, 在垂直腔面发射激光器的有源区引入各向异性增益
从而达到控制其偏振的目的. 光栅参数设计基于均匀介质理论和抗反射理论 …

Guided-mode resonances in dielectric photonic crystal slabs with low index contrast

T Kusserow, Y Khan, R Zamora… - … on Optical MEMS …, 2012 - ieeexplore.ieee.org
We present nanophotonic structures consisting of a dielectric slab waveguide with low index
contrast and photonic crystals. The guided-mode resonance effect is used to implement …

Large-Area and High-Precision Milling of Focused Ion Beam Based on the Integration of Nanoscale Machine Vision and Compensation Control

D Guo, S Fan, Y Yang, Z Chen, H Huang… - Microscopy and …, 2023 - academic.oup.com
Focused ion beam (FIB) is a high-precision technology for micro/nanofabrication that can be
used to fabricate micro/nanoscale structures and electronic devices, such as waveguide …