Hydrogen sensors are of increasing importance in connection with the development and
expanded use of hydrogen gas as an energy carrier and as a chemical reactant. There are …

This paper provides a detailed overview of developments in transducer materials technology
relating to their current and future applications in micro-scale devices. Recent advances in …

Palladium (Pd) has received attention as an ideal hydrogen sensor material due to its
properties such as high sensitivity and selectivity to hydrogen gas, fast response, and …

We examined the atomic layer deposition (ALD) of Pd films using sequential exposures of
Pd (II) hexafluoroacetylacetonate (Pd (hfac) 2) and formalin and discovered that formalin …

Present work demonstrates the hydrogen gas (H 2) sensing characteristics of palladium-
platinum (Pd-Pt) functionalized silicon carbide (SiC) thin film grown on porous silicon (PSi) …

Abstract nanotube films were formed on pure Ti, Ti–Pt, and Ti–Pd thin films by anodization in
a mixture of glycerol and water (1: 1 volume ratio) containing 0.5 wt% and were applied as a …

Pd–Ni alloy nanocrystals, with a controlled Ni atom content ranging from 0 to 60%, were
synthesized with a gas aggregation process. The mean size of the alloy nanoparticles was …

This chapter reviews the status of SiC Schottky barrier diode development. The
fundamentals of Schottky barrier diodes are first provided, followed by the review of high …

A highly sensitive hydrogen gas sensor of the multi-layer, micro heater type was designed
and fabricated using a microelectromechanical system (MEMS) process. A sensing layer (Pd …

Fabrication of TiO 2 nanotubes-based solid-state vapor sensor (Au/TiO 2 nanotubes/Ti) and
its performance analysis for both resistive-and capacitive-mode sensing mechanisms are …