This review provides an overview of the current state‐of‐the‐art of the emerging field of
flexible multifunctional sensors for wearable and robotic applications. In these application …

Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …

Micro and nanoelectromechanical systems M/NEMS have been extensively investigated
and exploited in the past few decades for various applications and for probing fundamental …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

With the technological advancement in micro-electro-mechanical systems (MEMS),
microfabrication processes along with digital electronics together have opened novel …

Abstract Lab-on-a-chip (LOC) or micro total analysis system is one of the microfluidic
technologies defined as the adaptation, miniaturization, integration, and automation of …

MEMS sensors based on magnetoelectric composites have attracted great interest due to
their capability to detect weak magnetic fields, showing high potential in applications like …

Piezoelectric materials have attracted considerable attention over the last two decades
because many technologies utilize their core properties of piezoelectric materials. Previous …

Nano-and micro-electromechanical systems (N/MEMSs) are traditionally based on
electrostatic or piezoelectric coupling, which couples electrical and mechanical energy …

With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …