Progress in semiconductor diamond photodetectors and MEMS sensors

M Liao - Functional Diamond, 2022 - Taylor & Francis
Diamond with an ultra-wide bandgap shows intrinsic performance that is extraordinarily
superior to those of the currently available wide-bandgap semiconductors for deep …

Diamond MEMS: From classical to quantum

H Sun, Z Zhang, Y Liu, G Chen, T Li… - Advanced Quantum …, 2023 - Wiley Online Library
Diamond has numerous outstanding properties in mechanics, physics, chemistry,
electronics, thermodynamics, and spintronics for either classic micro/nanoelectromechanical …

[HTML][HTML] Direct femtosecond laser writing of nanochannels by carbon allotrope transformation

SD Janssens, D Vázquez-Cortés, B Sutisna, E Fried - Carbon, 2023 - Elsevier
Existing approaches for creating durable nanochannels are complex, expensive, and time-
consuming. Here, a novel approach is presented in which a femtosecond laser is used to …

Effects of substrate temperature and intermediate layer on adhesion, structural and mechanical properties of coaxial arc plasma deposition grown nanodiamond …

AM Ali, M Egiza, K Murasawa, H Sugita… - Surface and Coatings …, 2021 - Elsevier
Low-temperature fabrication of nanodiamond films on untreated silicon substrates, which
are preferred substrates and widely employed in industry, can extend nanodiamond film …

Single-crystal diamond microelectromechanical resonator integrated with a magneto-strictive galfenol film for magnetic sensing

Z Zhang, H Wu, L Sang, J Huang, Y Takahashi, L Wang… - Carbon, 2019 - Elsevier
Single-crystal diamond (SCD) is a promising material for micro-electromechanical system
(MEMS) devices to achieve high performance and reliability due to its prominent mechanical …

[HTML][HTML] Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS

G Chen, Z Zhang, Y Koide, S Koizumi, Z Huang… - Diamond and Related …, 2023 - Elsevier
Single-crystal diamond presents as an ideal semiconductor material for high-performance
and high-reliability MEMS devices, on account of its outstanding mechanical and physical …

Low-Energy Dissipation Diamond MEMS

G Chen, S Koizumi, Y Koide, M Liao - Accounts of Materials …, 2024 - ACS Publications
Conspectus Microelectromechanical systems (MEMS) that integrate tiny mechanical devices
with electronics on a semiconductor substate have experienced explosive growth over the …

Oxygen-termination effect on the surface energy dissipation in diamond MEMS

K Gu, Z Zhang, G Chen, J Huang, Y Koide, S Koizumi… - Carbon, 2024 - Elsevier
Single-crystal diamond (SCD) microelectromechanical systems (MEMS) resonators with
lower energy dissipation and higher quality (Q) factors have always been pursued for the …

One-dimensional diamond nanostructures: Fabrication, properties and applications

J Lu, D Xu, N Huang, X Jiang, B Yang - Carbon, 2024 - Elsevier
Diamonds exhibit a unique combination of numerous excellent physical and chemical
properties, such as the highest hardness, high Young's modulus, wide bandgap, high carrier …

Precise characterization of atomic-scale corrosion of single crystal diamond in H2 plasma based on MEMS/NEMS

H Wu, Z Zhang, L Sang, T Li, J You, M Imura, Y Koide… - Corrosion …, 2020 - Elsevier
It is well known that single crystal diamond (SCD) could be etched in hydrogen plasma
ambient. However, the precise characterization of the corrosion behavior of SCD is not well …