Progress in semiconductor diamond photodetectors and MEMS sensors
M Liao - Functional Diamond, 2022 - Taylor & Francis
Diamond with an ultra-wide bandgap shows intrinsic performance that is extraordinarily
superior to those of the currently available wide-bandgap semiconductors for deep …
superior to those of the currently available wide-bandgap semiconductors for deep …
Diamond MEMS: From classical to quantum
Diamond has numerous outstanding properties in mechanics, physics, chemistry,
electronics, thermodynamics, and spintronics for either classic micro/nanoelectromechanical …
electronics, thermodynamics, and spintronics for either classic micro/nanoelectromechanical …
[HTML][HTML] Direct femtosecond laser writing of nanochannels by carbon allotrope transformation
Existing approaches for creating durable nanochannels are complex, expensive, and time-
consuming. Here, a novel approach is presented in which a femtosecond laser is used to …
consuming. Here, a novel approach is presented in which a femtosecond laser is used to …
Effects of substrate temperature and intermediate layer on adhesion, structural and mechanical properties of coaxial arc plasma deposition grown nanodiamond …
Low-temperature fabrication of nanodiamond films on untreated silicon substrates, which
are preferred substrates and widely employed in industry, can extend nanodiamond film …
are preferred substrates and widely employed in industry, can extend nanodiamond film …
Single-crystal diamond microelectromechanical resonator integrated with a magneto-strictive galfenol film for magnetic sensing
Single-crystal diamond (SCD) is a promising material for micro-electromechanical system
(MEMS) devices to achieve high performance and reliability due to its prominent mechanical …
(MEMS) devices to achieve high performance and reliability due to its prominent mechanical …
[HTML][HTML] Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS
Single-crystal diamond presents as an ideal semiconductor material for high-performance
and high-reliability MEMS devices, on account of its outstanding mechanical and physical …
and high-reliability MEMS devices, on account of its outstanding mechanical and physical …
Low-Energy Dissipation Diamond MEMS
Conspectus Microelectromechanical systems (MEMS) that integrate tiny mechanical devices
with electronics on a semiconductor substate have experienced explosive growth over the …
with electronics on a semiconductor substate have experienced explosive growth over the …
Oxygen-termination effect on the surface energy dissipation in diamond MEMS
Single-crystal diamond (SCD) microelectromechanical systems (MEMS) resonators with
lower energy dissipation and higher quality (Q) factors have always been pursued for the …
lower energy dissipation and higher quality (Q) factors have always been pursued for the …
One-dimensional diamond nanostructures: Fabrication, properties and applications
Diamonds exhibit a unique combination of numerous excellent physical and chemical
properties, such as the highest hardness, high Young's modulus, wide bandgap, high carrier …
properties, such as the highest hardness, high Young's modulus, wide bandgap, high carrier …
Precise characterization of atomic-scale corrosion of single crystal diamond in H2 plasma based on MEMS/NEMS
It is well known that single crystal diamond (SCD) could be etched in hydrogen plasma
ambient. However, the precise characterization of the corrosion behavior of SCD is not well …
ambient. However, the precise characterization of the corrosion behavior of SCD is not well …