Trap rich layer with through-silicon-vias in semiconductor devices

A Arriagada, C Brindle, MA Stuber - US Patent 9,558,951, 2017 - Google Patents
An integrated circuit chip is formed with a circuit layer, a trap rich layer and through-
semiconductor-vias. The trap rich layer is formed above the circuit layer. The through …

A Comparison of Radiation-Induced and High-Field Electrically Stress-Induced Interface Defects in Si/SiO₂ MOSFETs via Electrically Detected Magnetic Resonance

FV Sharov, SJ Moxim, GS Haase… - … on Nuclear Science, 2022 - ieeexplore.ieee.org
We utilize electrically detected magnetic resonance (EDMR) measurements to compare high-
field stressed, and gamma irradiated Si/SiO 2 metal–oxide–silicon (MOS) structures. We …

Charge pumping technique to measure polarization switching charges of FeFETs

KJ Nam, JM Park, BD Choi… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
This study proposes a new method to measure the polarization charge of ferroelectric field-
effect transistors (FeFETs) using a pulse generator and source measurement unit (SMU) and …

[PDF][PDF] Distribution of interface states in MOS systems extracted by the subthreshold current in MOSFETs under optical illumination

MS Kim, HT Kim, SS Chi, TE Kim, HT Shin… - Journal-Korean …, 2003 - silk.kookmin.ac.kr
It is well known that the interface traps at the Si/SiO2 interface in MOS (metal-oxide-
semiconductor) structures play an important role in determining the threshold voltage (VT) …

Redistribution layer contacting first wafer through second wafer

SB Molin, MA Stuber, M Drucker - US Patent 9,754,860, 2017 - Google Patents
257/774 2010/0243040 A1 9/2010 Kim 2012/0074579 Al 3/2012 Su et al. 2012/0146193 Al
6/2012 Stuber et al. 2012/0161310 Al 6/2012 Brindle et al. 2013/0037922 A1 2/2013 …

Analysis on temperature dependence of hot carrier degradation by mechanism separation

J Kim, K Hong, H Shin - IEEE Journal of the Electron Devices …, 2020 - ieeexplore.ieee.org
Temperature dependence under various HCD conditions was analyzed in 14 nm node
FinFETs. Unlike oxide traps, interface traps show different temperature dependence …

Trap rich layer for semiconductor devices

CN Brindle, MA Stuber, SB Molin - US Patent 9,570,558, 2017 - Google Patents
An integrated circuit chip is formed with an active layer and a trap rich layer. The active layer
is formed with an active device layer and a metal interconnect layer. The trap rich layer is …

Differential body-factor technique for characterization of interface traps in MOSFETs

D Yun, M Bae, J Jang, H Bae, JS Shin… - IEEE electron device …, 2011 - ieeexplore.ieee.org
A differential body-factor technique (DBT) is proposed for characterization of interface traps
in MOSFETs employing the differential body factor dm/dV GS instead of the subthreshold …

Optical subthreshold current method for extracting the interface states in MOS systems

MS Kim, IC Nam, HT Kim, HT Shin… - IEEE Electron …, 2004 - ieeexplore.ieee.org
Optical subthreshold current method (OSCM) is proposed for characterizing the interface
states in MOS systems using the current-voltage characteristics under a photonic excitation …

Sub-bandgap photonic gated-diode method for extracting distributions of interface states in MOSFETs

SS Chi, HT Kim, MS Kim, TE Kim, HT Shin, HS Park… - Electronics Letters, 2003 - IET
A new sub-bandgap photonic gated-diode method is proposed to extract the energy-
dependent and spatial distributions of traps at the SiO2/Si interface in MOSFETs. For the …