Low-temperature molecular layer deposition using monofunctional aromatic precursors and ozone-based ring-opening reactions
Molecular layer deposition (MLD) is an increasingly used deposition technique for
producing thin coatings consisting of purely organic or hybrid inorganic–organic materials …
producing thin coatings consisting of purely organic or hybrid inorganic–organic materials …
[HTML][HTML] Molecular and Atomic Layer Deposition of Hybrid Inorganic-Organic Materials–Deposition on Porous Substrates
L Keskiväli - 2024 - helda.helsinki.fi
This thesis focuses on increasing the general knowledge of molecular layer deposition
(MLD) research, developing novel low-temperature MLD coatings and on the preparation of …
(MLD) research, developing novel low-temperature MLD coatings and on the preparation of …