[HTML][HTML] Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques
Aluminum nitride (AlN) is a technologically relevant material that can be deposited at low
temperatures in the form of thin-films while preserving most of its physical properties …
temperatures in the form of thin-films while preserving most of its physical properties …
Vertical etching of scandium aluminum nitride thin films using TMAH solution
A wide bandgap, an enhanced piezoelectric coefficient, and low dielectric permittivity are
some of the outstanding properties that have made Sc x Al 1− x N a promising material in …
some of the outstanding properties that have made Sc x Al 1− x N a promising material in …
The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films
Aluminium nitride (AlN) reactively sputter-deposited from an aluminium target is an
interesting piezoelectric thin film material with high CMOS compatibility. A good c-axis …
interesting piezoelectric thin film material with high CMOS compatibility. A good c-axis …
Aluminum nitride thin film based reconfigurable integrated photonic devices
In the past few decades, silicon photonics with complementary metal-oxide-semiconductor
(CMOS) process compatibility has been well developed and successfully applied to …
(CMOS) process compatibility has been well developed and successfully applied to …
Fabrication, characterization and electrochemical simulation of AlN-gate ISFET pH sensor
This paper presents fabrication, characterization and modeling of aluminum nitride (AIN)-
gate ion-sensitive field-effect transistor based pH sensor. The AIN sensing film is deposited …
gate ion-sensitive field-effect transistor based pH sensor. The AIN sensing film is deposited …
ScAlN MEMS cantilevers for vibrational energy harvesting purposes
PM Mayrhofer, C Rehlendt… - Journal of …, 2016 - ieeexplore.ieee.org
Piezoelectric energy harvesting offers the possibility to make use of ambient vibrations most
beneficially to feed low power sensor nodes. This paper demonstrates the fabrication and …
beneficially to feed low power sensor nodes. This paper demonstrates the fabrication and …
[HTML][HTML] High-fidelity patterning of AlN and ScAlN thin films with wet chemical etching
We report on the anisotropic wet etching of sputtered AlN and Sc 0.2 Al 0.8 N thin films. With
tetramethyl ammonium hydroxide at 80° C, the etch rates along the c-axis were 330 and 30 …
tetramethyl ammonium hydroxide at 80° C, the etch rates along the c-axis were 330 and 30 …
Modal optimization and filtering in piezoelectric microplate resonators
JL Sanchez-Rojas, J Hernando… - Journal of …, 2010 - iopscience.iop.org
A systematic design procedure to tailor the modal response of micro-resonators based on
flexible plates with piezoelectric films is demonstrated. Sensors/actuators were designed by …
flexible plates with piezoelectric films is demonstrated. Sensors/actuators were designed by …
Vertical and Lateral Etch Survey of Ferroelectric AlN/Al1−xScxN in Aqueous KOH Solutions
Z Tang, G Esteves, J Zheng, RH Olsson III - Micromachines, 2022 - mdpi.com
Due to their favorable electromechanical properties, such as high sound velocity, low
dielectric permittivity and high electromechanical coupling, Aluminum Nitride (AlN) and …
dielectric permittivity and high electromechanical coupling, Aluminum Nitride (AlN) and …
c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes
Aluminum nitride (AlN) reactively sputter deposited from an aluminum target is an interesting
compound material due to its CMOS compatible fabrication process and its piezoelectric …
compound material due to its CMOS compatible fabrication process and its piezoelectric …