This study presents a thorough theoretical and experimental investigation on the nonlinear
damping of in-plane micromachined electromechanical resonators. More specifically …

We investigate the rich potential of the multi-modal motions of electrostatically actuated
asymmetric arch microbeams to design higher sensitivity and signal-to-noise ratio (SNR) …

This work focuses on mathematically studying thermoelastic damping (TED) and frequency
shift (FS) in micro-scale piezoelectro-magneto-thermoelastic (PEMT) composite beams …

This study investigates the effect of air damping on in-plane silicon micro/nano-resonators
sandwiched between two electrodes (two ports) for sensing and actuation. Experimental …

ABSTRACT A novel mode-localized acceleration sensor employing an electrostatically
coupled resonator and integrating a lever with proof mass is micromachined using standard …

Due to the considerable importance of viscous damping as a principal source of energy
dissipation in microstructures, this manuscript presents a mathematical model to predict the …

This paper describes the realization of piezoelectric-on-silicon lateral field Lorentz force
magnetometers (LFMs) that target operation in ambient pressure instead of vacuum …

This paper presents a detailed analysis of squeeze film air damping effects on dynamic
responses of RF-MEMS switches under varying environmental conditions, etch holes' …

We investigate theoretically and experimentally the mechanical behavior of Micro
electromechanical systems MEMS resonators with multiple input (actuation) and output …

A very important aspect in the design of RF-MEMS switches, is to obtain low switching time.
The switching time not only depends on the device geometric parameters but also on the …