Nanoscale control by chemically vapour-deposited polymers
KK Gleason - Nature Reviews Physics, 2020 - nature.com
Chemical vapour deposition (CVD) enables nanoscale control for the synthesis of high-
purity polymer thin films. Ultrathin (< 20 nm) and ultrasmooth (< 1 nm rms roughness) layers …
purity polymer thin films. Ultrathin (< 20 nm) and ultrasmooth (< 1 nm rms roughness) layers …
Microstructural effects on the interfacial adhesion of nanometer-thick Cu films on glass substrates: implications for microelectronic devices
A Lassnig, VL Terziyska, J Zalesak… - ACS Applied Nano …, 2020 - ACS Publications
Improving the interface stability for nanosized thin films on brittle substrates is crucial for
technological applications such as microelectronics because the so-called brittle–ductile …
technological applications such as microelectronics because the so-called brittle–ductile …