Silicon dioxide sacrificial layer etching has become a major surface micromachining method
to fabricate microsensors and microactuators often made of polycrystalline silicon. An …

A new micromachined gyroscope based on a vibrating ring is described. The device
measures rotation rate or whole angle inertial rotation by monitoring the position of node …

The silicon age that led the computer revolution has significantly changed the world. The
next 30 years will see the incorporation of new types of functionality onto the chip-structures …

This work, the second of two parts, reports on the implementation and characterization of
high-quality factor (Q) side-supported single crystal silicon (SCS) disk resonators. The …

A new method for dry etching of silicon dioxide for surface micromachining is presented to
obtain very compliant polysilicon microstructures with negligible stiction problem and to …

Five different procedures commonly used to rinse and dry released microstructures are
compared: evaporation drying with deionized (DI) water or methanol, sublimation drying with …

This paper describes a view of future prospects of microactuators, micro miniature motion
systems (in short, microsystems), and the fabrication technology involved. Microsystems may …

We describe a micromachined magnetic-field sensor that is based on an electron tunneling
transducer. This tunnel sensor is small, very sensitive, operates at ambient temperature and …

A simple but efficient technique to avoid the post-release adhesion problem of
surfacemicromachined movable structures is reported. A grid pattern of photoresist …

New high sensitivity microsensors have been developed using high-resolution position
sensors based on electron tunneling. The design of miniature accelerometers having …