The characterization and fabrication of pyroelectric infrared sensor

CC Chang, KP Chu, YC Lai - Journal of Applied Science and …, 2005 - jase.tku.edu.tw
The pyroelectric infrared (PIR) sensor with a calcium-modified lead titanate Pb1-xCaxTiO3
thin film with x= 0.3 [PCT (30)] thin film have been successfully fabricated. A RF planar …

The Characterization and Fabrication of Pyroelectric Infrared Sensor and Application of Thermal Image Array

CC Chang, CH Lee, KP Chu - Journal of Applied Science and …, 2004 - 163.13.100.126
The pyroelectric infrared (PIR) sensor with the lead-titanate (PbTiO3) thin film has been
successfully fabricated. A RF planar magnetron sputter was used to deposit PbTiO3 thin film …