In this letter, we present the design, fabrication, and electrical testing of a silicon carbide
microelectromechanical (MEMS) resonant device with electrothermal actuation and …

We demonstrate the excitation of combination resonances of additive and subtractive types
and their exploitations to realize a large bandwidth micro-machined resonator of large …

This paper presents the fabrication and characterization of silicon carbide (SiC) flexural-
mode structures able to operate as electrothermomechanical tunable resonators. Single-and …

In this study, we introduce light-actuated electrothermal (ET) flow as a means for fluid mixing
in lab-on-a-chip (LOC) systems. The study begins with physically understanding the light …

There has been great interest and emerging demand for the development of aerospace
sensing technology. This technology is used for sensing a wide range of systems working in …

An amplitude demodulator with a large dynamic range, based on microelectromechanical
systems (MEMS), is proposed in this paper. It is implemented as a cascade of a capacitive …

Multilayered microresonators commonly use sensitive coating or piezoelectric layers for
detection of mass and gas. Most of these microresonators have a variable cross-section that …

A dual-channel amplitude demodulator based on a micro-electromechanical systems
(MEMS) approach for radio relay station on-line detection is proposed in this letter. This …

This paper presents a new method for the demodulation of radio frequency (RF) signals
using an electrostatic actuator that acts as a mechanical mixer, directly converting RF …

In the drive to miniaturise and integrate reference oscillator components,
microelectromechanical systems (MEMS) resonators are excellent candidates to replace …